DLC 박막 코팅 에대한 논문 입니다.
2021년 표면공학회지에 실린 논문이네요.
무료로 보실 수 있는 논문이지만 저작권법에 위배되지 않도록 구글 학술의 링크로 내용을 대체 합니다.
https://www.koreascience.or.kr/article/JAKO202103839120496.pdf
Abstract
In this study, DLC films deposited by PECVD were evaluated to the properties of super-hydrophobic by CF4 treatment. The structure of DLC films were confirmed by Raman Spectra whether or not mixed sp3 (like diamond) peak and sp2 (like graphite) peak. And the hydrogen contents in the DLC films (F-DLC) were measured by RBS analysis. In addition, DLC films were analyzed by scratch test for adhesion, nano-indentation for hardness and tribo-meter of Ball-on-disc type for friction coefficient. In the result of analysis, DLC films had traditional structure regardless of variation of hardness at constant conditions. Also adhesion of DLC film was increased as higher material hardness. Otherwise, friction coefficient was increased as lower material hardness. The DLC films were treated by CF4 plasma treatment to enhance the properties of super-hydrophobic. And the DLC films were measured by ESEM(Enviromental Scanning Electron Microscope) for water condensation.
출처: PARK, Hyun-Jun; KIM, Jun-Hyung; MOON, Kyoung-Il. Effect of fluorine gas addition for improvement of surface wear property of DLC thin film deposited by using PECVD. Journal of the Korean institute of surface engineering, 2021, 54.6: 357-364.
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